TY - JOUR
T1 - Chemical characterization of DC-sputtered In2O3 films with a top SnO2 layer
AU - Bedoya-Calle, Álvaro
AU - García-Méndez, Manuel
AU - Torres-Castro, Alejandro
AU - Shaji, Sadasivan
AU - Ortiz-Méndez, Ubaldo
N1 - Publisher Copyright:
© (2015) Trans Tech Publications, Switzerland.
PY - 2015/1/1
Y1 - 2015/1/1
N2 - In2O3 thin films with a top layer of SnO2 were deposited onto glass substrates by DC reactive-magnetron sputtering. After deposition, In2O3/SnO2 samples were annealed in vacuum at 400°C. Structural, optical, and chemical composition was investigated by X-ray diffraction, UV-Vis spectroscopy and XPS, respectively. X-ray data showed that films grow polycrystalline, where indium oxide crystallized in cubic as the main phase, with a preferential growth at the [0002] direction and lattice parameter of 10.11 Å. Signals of rhombohedral phase were also detected. XPS depth profiles show that tin coexists in Sn2+ and Sn4+, while indium maintains the In2O3 stoichiometry. Binding energy of Sn4+ bound to oxygen was detected at 468 eV while In2+ bound to oxygen at 444. 7 eV. Nor tertiary compounds were detected at the In2O3/SnO2 interface, neither In or Sn in metallic state.
AB - In2O3 thin films with a top layer of SnO2 were deposited onto glass substrates by DC reactive-magnetron sputtering. After deposition, In2O3/SnO2 samples were annealed in vacuum at 400°C. Structural, optical, and chemical composition was investigated by X-ray diffraction, UV-Vis spectroscopy and XPS, respectively. X-ray data showed that films grow polycrystalline, where indium oxide crystallized in cubic as the main phase, with a preferential growth at the [0002] direction and lattice parameter of 10.11 Å. Signals of rhombohedral phase were also detected. XPS depth profiles show that tin coexists in Sn2+ and Sn4+, while indium maintains the In2O3 stoichiometry. Binding energy of Sn4+ bound to oxygen was detected at 468 eV while In2+ bound to oxygen at 444. 7 eV. Nor tertiary compounds were detected at the In2O3/SnO2 interface, neither In or Sn in metallic state.
UR - http://www.scopus.com/inward/record.url?scp=84951010161&partnerID=8YFLogxK
U2 - 10.4028/www.scientific.net/JNanoR.30.86
DO - 10.4028/www.scientific.net/JNanoR.30.86
M3 - Artículo
AN - SCOPUS:84951010161
SN - 1662-5250
VL - 30
SP - 86
EP - 95
JO - Journal of Nano Research
JF - Journal of Nano Research
ER -