Influence of deposition temperature on WTiN coatings tribological performance

R. F. Londoño-Menjura, R. Ospina, D. Escobar, J. H. Quintero, J. J. Olaya, A. Mello, E. Restrepo-Parra

Producción científica: Contribución a una revistaArtículorevisión exhaustiva

23 Citas (Scopus)


© 2017 WTiN films were grown on silicon and stainless-steel substrates using the DC magnetron sputtering technique. The substrate temperature was varied taking values of 100 °C, 200 °C, 300 °C, and 400 °C. X-ray diffraction analysis allowed us to identify a rock salt-type face centered cubic (FCC) structure, with a lattice parameter of approximately 4.2 nm, a relatively low microstrain (deformations at microscopy level, between 4.7% and 6.7%), and a crystallite size of a few nanometers (11.6 nm–31.5 nm). The C1s, N1s, O1s, Ti2p, W4s, W4p, W4d and W4f narrow spectra were obtained using X-ray photoelectron spectroscopy (XPS) and depending on the substrate temperature, the deconvoluted spectra presented different binding energies. Grain sizes and roughness (approximately 4 nm) of films were determined using atomic force microscopy. Scratch and pin on disc tests were conducted, showing better performance of the film grown at 200 °C. This sample exhibited a lower roughness, coefficient of friction, and wear rate.
Idioma originalInglés estadounidense
Páginas (desde-hasta)1096-1104
Número de páginas9
PublicaciónApplied Surface Science
EstadoPublicada - 1 ene. 2018

Tipos de productos de Minciencias

  • Artículo A1 - Q1


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