TY - JOUR
T1 - Plasma diagnostic and microstructural study of WCN coatings growth by pulsed vacuum arc discharge
AU - Restrepo-Parra, Elisabeth
AU - Escobar, Daniel
AU - Ospina, Rogelio
AU - Quintero, Jorge Hernán
AU - Londoño, Ricardo M.
N1 - Funding Information:
This research was supported by the Universidad Nacional de Colombia, Sede Manizales.
Funding Information:
Information This research was supported by the Universidad Nacional de Colombia, Sede Manizales.The authors gratefully acknowledge the financial support of Facultad de Ciencias Exactas y Naturales of the Universidad Nacional de Colombia, Sede Manizales and La Direcciñ Nacional de Investigaciones de la Universidad Nacional de Colombia, Sede Manizales DIMA during the course of this research under the projects 28289 and 28333.
Funding Information:
The authors gratefully acknowledge the financial support of Facultad de Ciencias Exactas y Naturales of the Universidad Nacional de Colombia, Sede Manizales and La Direcciñ Nacional de Investigaciones de la Universidad Nacional de Colombia, Sede Manizales DIMA during the course of this research under the projects 28289 and 28333.
PY - 2018/10/1
Y1 - 2018/10/1
N2 - In this work, we present a study of the plasma evolution during tungsten carbon nitride (WCN) coatings production using the repetitive pulsed arc technique. For the coatings production, a tungsten carbide (WC) target, and a mixture of argon and nitrogen as the filled gas were used. The study was carried out for discharges generated with one, two, three, and four pulses. The WCN coatings were characterized by X-ray diffraction (XRD) to identify the phases present in this material. The plasma was experimentally studied by optical emission spectroscopy (OES). A correlation was found between the spectral lines behavior and the material composition evolution. As the number of pulses increased, the intensity of the spectral lines also increased, especially in the case of the atomic lines of nitrogen, NI. The results were analysed to obtain information regarding the reactions in the plasma, as well as the electron temperature and density.
AB - In this work, we present a study of the plasma evolution during tungsten carbon nitride (WCN) coatings production using the repetitive pulsed arc technique. For the coatings production, a tungsten carbide (WC) target, and a mixture of argon and nitrogen as the filled gas were used. The study was carried out for discharges generated with one, two, three, and four pulses. The WCN coatings were characterized by X-ray diffraction (XRD) to identify the phases present in this material. The plasma was experimentally studied by optical emission spectroscopy (OES). A correlation was found between the spectral lines behavior and the material composition evolution. As the number of pulses increased, the intensity of the spectral lines also increased, especially in the case of the atomic lines of nitrogen, NI. The results were analysed to obtain information regarding the reactions in the plasma, as well as the electron temperature and density.
KW - OES
KW - plasma parameters
KW - plasma reactions
KW - pulsed vacuum arc
KW - XRD
UR - http://www.scopus.com/inward/record.url?scp=85054655124&partnerID=8YFLogxK
U2 - 10.1002/ctpp.201600062
DO - 10.1002/ctpp.201600062
M3 - Artículo
AN - SCOPUS:85054655124
SN - 0863-1042
VL - 58
SP - 827
EP - 837
JO - Contributions to Plasma Physics
JF - Contributions to Plasma Physics
IS - 9
ER -